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Chemheat
Application
Semiconductor Wet Processes, Filtration, Sterilization/Cleaning, Surface Finishing
Materials
Performance
Wattages 2kW to 6kW
Specifications
Inlet/Outlet Types/Sizes Drain • FLARETEK® : 12.7mm (0.5 inch), 19.05mm (0.75 inch), or 25.4mm (1.0 inch). • SUPER 300 TYPE PILLAR® (300 SP) : 12.7mm (1/2 inch), 19.05mm (3/4 inch), or 25.4mm (1 inch). • Drain : 9.5mm (0.375 inch), or 12.7mm (0.5 inch ) flared, or Super 300 Type Pillar. Custom inlet/outlets also available.
Features
- Innovative Design for Ultra-High-Purity (UHP): Cleanroom assembled, Chemistry contained within PTFE tubing to eliminate environmental exposure, No wetted o-rings, Patented purge technology detects breaches in the fluid path, prevents chemical permeation and extends heater life (MTFB).
- Modular & Configurable: Reduced tool design space requirements Easily retrofits to existing tools Customized inlet/outlet options available.
- Low Internal Volume: Fast heat-up Reduced chemistry costs Precise and stable temperature control.
New - Small footprint chemical heater.
Best-in-class heating for wet-process chemistries. Designed to support advanced Ultra-High-Purity (UHP) requirements. ChemHeat PTFE flow path utilizes all fluoropolymer (PTFE) wetted materials, an o-ringless sealing design, and the capability to detect any breach in the fluid path. Suitable for all non-flammable chemistries in either single pass or recirculating flow applications. Engineered for safety and reliability. Compact to fit into existing environments. Fast heat-up. Clean room assembled. Heats up to 203°F (95°C).
Safety & Reliability: Internal grounding clear of the fluid path, Lower surface temperatures, Extended life of heater due to patented purge protection. Patented purge protection and leak detection. Element temperature sensor Choice between Type E, J, K thermocouple, 100-Ohm RTD, or 1000-Ohm RTD (2, 3, or 4 wire).
Dimensions: 225mm (8.86 inch) x 508mm (20 inch) x 147mm (5.79 inch)
Process Technology Product Bulletin
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