Lufran® DI Water

Application

Semiconductor, Semiconductor wet processes, Flat Panel Display, Filtration, Sterilization/cleaning

Materials

Performance

Wattages 24 kw to 312 kW

Specifications

Temperature Accuracy Lufran - (DAC) Temperature Accuracy: +/_ 0.3ºC, depending on operating conditions. Lufran LT - (PID) Temperature Accuracy: +/_ 3ºC, depending on operating conditions

Features

- EMO Circuit (local and remote)

- USB Data Logging

- System Pressure Monitor

- Process High Pressure Alarm

- Heater Overtemp Circuitry

- Ground Fault Protection

- Capacitive Liquid Level Sensor Protection on Elements

- Purge Control Monitors

- PVDF Pressure Relief Valve

Please see product bulletin for more information.

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The ultimate in ultra-pure, deionized water heating.

Complete Turn-Key System! Industry leading heating solution is an ultra-pure, ultra-reliable high purity water heater! Utilizing PTFE and PVDF wetted surfaces, the Lufran DI Series is the preferred and industry-leading heating solution for highly-critical semiconductor and flat panel display manufacturing processes. Featuring an advanced temperature control system and sizes up to 312kW, this is the ultimate in ultra-pure deionized water heating. Offers exceptional MTBF of ten years! Thousands of installations worldwide. Worldwide field service support. 99% energy efficient! Heats up to 194°F (90°C).

Process Technology Product Bulletin

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