SHB/SHC

Application

Semiconductor Wafer Cleaning, Etching, Inline Chemical Heating, Point of Use Heating (POU)

Materials

Performance

Wattages 250W to 2000W

Specifications

Fluid Connections: 3mm, 6mm, 9mm or 12mm. Custom connections available.

Features

- Engineered for Safety: Optimized to safely heat chemicals and flammable solvents through indirect contact Redundant temperature sensors ensure safe operation PTC (self-limiting) heating technology standard

- Advanced Cleanliness: O-ring free and crevice free design eliminates source for contamination SHB series: Electropolished 316SS for solvents SHC series: PTFE & PFA wetted surfaces for acids and solvents

- Designed for performance: Allows for precise and stable temperature control Low watt density design for lower surface temperatures

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Superior indirect heating.

The SHB/SHC, a low wattage inline chemical/solvent heater, delivers superior indirect heating with temperature stability. Using multiple temperature sensors and self-limiting technology, this heater ensures safe operation during low or no-flow conditions. SHB series: Electropolished 316SS for solvents. SHC series: PTFE & PFA wetted surfaces for acids and solvents. Heats up to 356°F (180°C).

Process Technology Product Bulletin

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