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HCQ
Application
Semiconductor Wafer Cleaning, design featuring
Materials
N/A
Performance
Wattages 750W to 12,000W
Specifications
Inlet/Outlet : 19mm (3/4”) MNPT flare quartz connections.
Features
- Outstanding Cleanliness: No ionic or bacterial contamination with 100% high purity quartz construction
- Reliable:Patented purge cooling system significantly extends heater element life versus conventional designs
- Secondary Containment: PTFE housing acts as a maintenance-free secondary containment vessel to help protect the environment from chemical spills
- No O-Rings: Eliminates process contamination associated with o-rings. Leak-free operation assured.
- Low Pressure Drop: Minimal pressure drop for high-circulation applications.
- Easy Maintenance with Minimal Downtime: Plug-in heater element is easily replaced in minutes. Fluid connections remain intact, eliminating the need for system re-qualification
- Low Cost of Ownership: Heating element can be field replaced without disturbing the plumbing connections or affecting the integrity of the chemistry
- Excellent Responsiveness: Halogen lamps provide instantaneous start-up & rapid response with excellent temperature stability under varying flow rates
- No Dead Zones: Tangential flow pattern eliminates stagnant zones in the heater. The heater is self-draining & self-venting (upon proper installation).
Minimal footprint quartz heating
The HCQ Quartz Inline Heater provides a minimal footprint, space-conscious design combined with ultra-pure, high-purity 100% quartz construction. The Isolated heating element virtually elimnates process contamination while multiple plumbing configurations ensure ease of operation. No dead-zones. Minimal pressure drop. Heats up to Up to 365°F (185°C).
Safety: Heater housing over-temperature shutoff & alarm (“J” type thermocouple and redundant bi-metallic snap switch). Purge gas verification & interlock. *Requires controller interface.
Process Technology Product Bulletin
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