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HCQ

Application

Semiconductor Wafer Cleaning, design featuring

Materials

N/A

Performance

Wattages 750W to 12,000W

Specifications

Inlet/Outlet : 19mm (3/4”) MNPT flare quartz connections.

Features

- Outstanding Cleanliness: No ionic or bacterial contamination with 100% high purity quartz construction

- Reliable:Patented purge cooling system significantly extends heater element life versus conventional designs

- Secondary Containment: PTFE housing acts as a maintenance-free secondary containment vessel to help protect the environment from chemical spills

- No O-Rings: Eliminates process contamination associated with o-rings. Leak-free operation assured.

- Low Pressure Drop: Minimal pressure drop for high-circulation applications.

- Easy Maintenance with Minimal Downtime: Plug-in heater element is easily replaced in minutes. Fluid connections remain intact, eliminating the need for system re-qualification

- Low Cost of Ownership: Heating element can be field replaced without disturbing the plumbing connections or affecting the integrity of the chemistry

- Excellent Responsiveness: Halogen lamps provide instantaneous start-up & rapid response with excellent temperature stability under varying flow rates

- No Dead Zones: Tangential flow pattern eliminates stagnant zones in the heater. The heater is self-draining & self-venting (upon proper installation).


Minimal footprint quartz heating

The HCQ Quartz Inline Heater provides a minimal footprint, space-conscious design combined with ultra-pure, high-purity 100% quartz construction. The Isolated heating element virtually elimnates process contamination while multiple plumbing configurations ensure ease of operation.  No dead-zones. Minimal pressure drop. Heats up to Up to 365°F (185°C).

Safety: Heater housing over-temperature shutoff & alarm (“J” type thermocouple and redundant bi-metallic snap switch). Purge gas verification & interlock. *Requires controller interface.

 

 

 

pdf

Process Technology Product Bulletin

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