800.565.5278Category
For More Information about the product contact us, order quote request or call 800.565.5278
TIH
Application
Semiconductor wafer cleaning, Solar/Photovoltaio Wafer Cleaning, Inline chemical heating
Materials
Performance
Wattages 1 kw to 18 kW
Specifications
Fluid Connections: 6 to 25mm flared 12 to 25mm Super 300 Type Pillar® Other connections available, consult factory. Wetted Surfaces: PFA and PTFE fluoropolymer No wetted “O” rings. Element Purge: Small amount of clean dry air (CDA) or N2 gas flows between the grounded element & PTFE sheath. Removes chemical permeation and minimizes ionic contamination for longer life.
Features
- Designed for Performance and Safety: High-temperature configuration available to heat chemicals up to 210°C, Multiple plumbing layouts available to better facilitate installation into a variety of tool configurations, Grounded electric heating elements, Redundant temperature sensors for safe operation Optional O-ring free construction minimizes contamination.
- Durable Constuction: Patented purge design removes chemical permeation to extend service life, All fluoropolymer-wetted surfaces withstand virtually, any wet chemistries, Heavy-wall PTFE chamber and heater sheath for high temperature/pressure applications.
Best-in-class chemical heater.
The TIH offers unmatched performance and reliability with the ability to heat a variety of chemicals. This heater is suitable for either single pass or recirculating applications. Delivers best-in-class performance over a wide range of flow and temperature requirements. The TIH is the most durable and long-lasting inline chemical heater available! Multiple plumbing layouts facilitate easy installation into a variety of tool configurations. Fluoropolymer (PTFE) surfaces protect from permeation. Heats up to 410°F (210°C).
Dimensions: 225mm (8.86 inch) x 508mm (20 inch) x 147mm (5.79 inch)
Process Technology Product Bulletin
Download file