XC Series

Application

Semiconductor Wafer Cleaning

Materials

Polypro, Kynar PVDF

Performance

Varies on materials

Specifications

Tube, Shell, & Drain: Flared connections standard, choose sizes and other options when ordering

Features

- Advanced Cleanliness: Chemistry fluid path made from high grade PFA, PTFE or PVDF components, no wetted o-ring seals eliminates source for contamination, assembled and tested in clean-room environment

- Compact Design: Reduces tool design space requirements, facilitates retrofitting of existing tools, simplifies manufacturing complexity

- Low Mass Heat Exchanger: enables faster temperature response, allows for precise and stable temperature control

Quote Request

Ultra-high purity heat exchanger.

With a PFA tube-side fluid path the XC Series will meet the most stringent cleanliness requirements to support the next generation semiconductor node technologies. Compact design. Ideal for one-pass cooling of chemicals dumping to waste stream and innovatively eliminates high costs associated with water aspiration. Less surface area required for same BTU exchange compared to most other fluoropolymer exchangers.

13mm (0.5 inch) PFA tubing, 0.76mm (0.030 inch) wall thickness All welded construction (shell) 114mm (4.5 inch) diameter polypropylene or PVDF shell Internally baffled for enhanced heat exchanger performance U” factor (depending on flow rate): 142-284 J/(s x m2 x °C) = 25-50 BTU/(hr x ft2x F) Shell-side drain connection.

Options: 6.4mm (0.25 inches) 19mm (0.75 inch), super 300 Pillar Type connections, custom sizes based on application, heavy-wall PFA tubing, 15.7mm (0.062 inch) wall thickness 121mm (4.75 inches) PTFE shell.

Process Technology Product Bulletin

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